VIBRATION GYRO ELEMENT, VIBRATION GYRO SENSOR, DETECTION METHOD OF ANGULAR VELOCITY BY VIBRATION GYRO SENSOR AND ELECTRONIC DEVICE

摘要

PROBLEM TO BE SOLVED: To improve accuracy of detection in a vibration gyro element.SOLUTION: The vibration gyro element includes: a base 10; a drive arm 20 extending from the base in a first direction in a predetermined plane; a detection arm 30 extending in a second direction intersecting the first direction in the predetermined plane from the base 10; a drive electrode disposed in the drive arm 20; and a detection electrode disposed in the detection arm 30. The driving arm 20 vibrates to a third direction perpendicular to the predetermined plane by the distortion of an electric field formed by the drive electrode, and thereby a drive vibration VA is generated. When a first detection vibration VB is generated in the drive arm 20 by an angular velocity acting around the axis of the first direction, a second detection vibration VC corresponding to the first detection vibration VB is generated, and an electric field is generated in the detection arm 30 by the distortion based on the second detection vibration VC. The movement of electric charge (Q1-Q4) is generated by the electric field generated in the detection arm 30 and the electric signal due to the movement of the electric charge (Q1-Q4) is taken out from the detection electrode.