C12A7 electride thin film manufacturing method and C12A7 electride thin film

摘要

A C12A7 electride thin film fabrication method includes a step of forming an amorphous C12A7 electride thin film on a substrate by vapor deposition under a low-oxygen-partial-pressure atmosphere using a target made of a crystalline C12A7 electride having an electron density within a range of 2.0×10 18 cm -3 to 2.3×10 21 cm -3 .