Electroosmotic flow pump, manufacturing method thereof, and microfluidic device

摘要

Provided is a novel electroosmotic pump capable of being driven by AC voltage. An electroosmotic pump (2) includes a porous dielectric membrane (21), a first water-permeable electrode (22), a second water-permeable electrode (23), and a hydrophilic layer (22a). The first water-permeable electrode (22) is disposed on one side of the porous dielectric membrane (21). The second water-permeable electrode (23) is disposed on the other side of the porous dielectric membrane (21). The hydrophilic layer (22a) is disposed to one side with respect to the center of the porous dielectric membrane (21) in a thickness direction.