Double-head surface grinding machine static pressure pad and double-head surface grinding method of workpiece

摘要

PROBLEM TO BE SOLVED: To provide a static pressure pad for a duplex surface grinder and a duplex surface grinding method of a workpiece which can reduce the consumption of a static-pressure fluid, can downsize auxiliary facilities related to supplying and collecting of the static-pressure fluid, and moreover can prevent the reduction in grinding precision due to staying of the static-pressure fluid and the grinding fluid.SOLUTION: The static pressure pad for a duplex surface grinder includes a plurality of static pressure support portions 13-1 to 13-3 and 14-1 to 14-4 hydrostatically supporting a workpiece through static fluid in a workpiece corresponding region 12 except for a grinding wheel arrangement portion 2 of a static pressure pad body 10, and a discharge passage 17 for discharging a static pressure fluid passing through the static pressure support portions 13-1 to 13-3 and 14-1 to 14-4 and a grinding fluid scattered from the grinding wheel arrangement portion 2 side. The discharge passage 17 has a function discharging without retaining the static pressure fluid or the grinding fluid scattered from the grinding wheel arrangement portion 2, and dispersively arranges each static pressure support portions 13-1 to 13-3 and 14-1 to 14-4 in the workpiece corresponding region 12 via the discharge passage 17.