Electrostatic discharge test apparatus, electrostatic discharge test method, and program

摘要

According to the present invention, the effects of static electricity on a sample being measured can be accurately ascertained. A discharge gun (14), in response to control, subjects a sample being measured (100) to a discharge. A first probe (11) is situated in proximity to the discharge location of the discharge gun (14). A second probe (12) is constituted to be moveable in the same direction as the placement direction of the sample being measured (100). The first probe (11) and the second probe (12) are connected to an oscilloscope (16). A control machine assess whether the output from the first probe (11) as measured by the oscilloscope (16) is equal to or greater than a predetermined voltage. In the event that a voltage at or above a predetermined voltage has been output, the control machine (17), employing the measured value of the output voltage of the second probe (12) and the timing of peak detection of the output voltage of the first probe (11), performs an evaluation of the effects of discharge on the sample being measured (100).