Resist liquid supply apparatus, resist coating apparatus, temperature control method of resist liquid, resist liquid storage apparatus, and method of manufacturing mask blank

摘要

PROBLEM TO BE SOLVED: To prevent sensitivity change or quality degradation of a resist liquid to be applied to a substrate as much as possible by uniformly managing a temperature of the resist liquid.SOLUTION: A resist liquid supply device 1 comprises: a resist bottle 11 in which a constant amount of a resist liquid is accumulated; supply means 30 for supplying the resist liquid in the resist bottle 11 to a dropping nozzle 20 which is a resist application device 2; a liquid tank 12 which is filled with a temperature control liquid 14 and in which the resist bottle 11 is immersed in the temperature control liquid 14; temperature control liquid circulation means 40 including an inflow port 41 which allows the temperature control liquid 14 to flow into the liquid tank 12 and an outflow port 42 which allows the temperature control liquid 14 to effuse from the liquid tank 12; and temperature control means 50 for controlling a temperature of the temperature control liquid 14 flowing from the inflow port 41 into the liquid tank 12. The temperature control means 50 continuously causes the temperature control liquid 14 controlled at a room temperature or at a cool temperature to flow into the liquid tank 12. Thereby, the resist liquid supply device keeps the temperature of the resist liquid in the resist bottle 11 and/or changes the temperature to the temperature of the temperature control liquid 14.