首页> 外国专利> RESIST LIQUID STORAGE CONTAINER, RESIST LIQUID SUPPLY DEVICE, RESIST LIQUID APPLICATION DEVICE, RESIST LIQUID PRESERVATION DEVICE, AND MASK BLANK MANUFACTURING METHOD

RESIST LIQUID STORAGE CONTAINER, RESIST LIQUID SUPPLY DEVICE, RESIST LIQUID APPLICATION DEVICE, RESIST LIQUID PRESERVATION DEVICE, AND MASK BLANK MANUFACTURING METHOD

机译:抗蚀剂液体储存容器,抗蚀剂液体供应装置,抗蚀剂液体应用装​​置,抗蚀剂液体保存装置和面膜空白制造方法

摘要

This resist liquid storage container has: a flexible bag section having a storage section for storing a resist liquid therein; an injection tube for injecting the resist liquid, said injection tube being in communication with the storage section; and a discharge tube for discharging the resist liquid to the outside of the resist liquid storage container, said discharge tube being in communication with the storage section.
机译:该抗蚀剂液体存储容器具有:柔性袋部,其具有用于在其中存储抗蚀剂液体的存储部;以及柔性袋部。用于注入抗蚀剂液体的注入管,所述注入管与存储部连通。排放管用于将抗蚀剂液体排放到抗蚀剂液体存储容器的外部,所述排放管与存储部分连通。

著录项

  • 公开/公告号SG11201707614UA

    专利类型

  • 公开/公告日2017-10-30

    原文格式PDF

  • 申请/专利权人 HOYA CORPORATION;

    申请/专利号SG20171107614U

  • 申请日2016-03-07

  • 分类号H01L21/027;B05C11/10;G03F7/26;

  • 国家 SG

  • 入库时间 2022-08-21 13:35:58

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