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Water vapor transmission rate of assessment for the structure and the water vapor transmission rate evaluation method

机译:结构的水蒸气透过率评估和水蒸气透过率评估方法

摘要

PROBLEM TO BE SOLVED: To provide a steam permeability evaluation structure body that can correctly measure steam permeability in a high barrier film having the steam permeability of 10g/m/day or less and is easily handled, and also to provide a steam permeability evaluation method.SOLUTION: In a steam permeability evaluation structure body 1, an aluminum thin film 3 patterned in a wiring shape is arranged on a substrate 2 and sealing is performed to cover the aluminum thin film 3 by a high barrier film 4 to be a measurement object. The steam permeability evaluation structure body is used to evaluate steam permeability by observing aluminum hydroxide to be generated by a reaction between the aluminum thin film 3 and steam permeating through the high barrier film 4.
机译:解决的问题:提供一种蒸汽透过率评价结构体,其可以正确地测量蒸汽透过率在10g / m / day以下的高阻隔膜中的蒸汽透过率,并且容易处理,并且提供一种蒸汽透过率评价方法解决方案:在蒸汽渗透性评估结构体1中,将以布线形状构图的铝薄膜3布置在基板2上,并进行密封以通过高阻挡膜4覆盖铝薄膜3作为测量对象。 。蒸汽透过率评价结构体用于通过观察由铝薄膜3与透过高阻挡膜4的蒸汽之间的反应而生成的氢氧化铝来评价蒸汽透过率。

著录项

  • 公开/公告号JP6069906B2

    专利类型

  • 公开/公告日2017-02-01

    原文格式PDF

  • 申请/专利权人 凸版印刷株式会社;

    申请/专利号JP20120144210

  • 发明设计人 黒木 恭子;

    申请日2012-06-27

  • 分类号G01N15/08;H01L51/50;H05B33/10;H05B33/04;

  • 国家 JP

  • 入库时间 2022-08-21 13:55:01

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