EUV light generation system, EUV light generation method, and Thomson scattering measurement system

摘要

An EUV light generation system according to the present disclosure includes a chamber, a target supply device that supplies a target to the inside of the chamber, and a drive laser device that generates EUV light by generating plasma by irradiating the target with drive pulse laser light. , A probe laser device that generates Thomson scattered light by irradiating plasma with probe pulse laser light, a spectroscope that measures the spectral waveform of the ion term of Thomson scattered light, and a Thomson scattered light that is placed in front of the spectrometer And a wavelength filter that suppresses light having a predetermined wavelength that is substantially the same as the wavelength of the probe pulse laser light from entering the spectroscope.