Method for repairing defects in graphene film and apparatus for measuring transmittance of graphene film

摘要

PROBLEM TO BE SOLVED: To provide a measuring apparatus capable of measuring a local transmissivity of a graphene film in a micrometer order, and a defect repair method for the graphene film.SOLUTION: A defect repair method for a graphene film includes detecting a defective spot of the graphene film on a local area of the graphene film by Raman spectroscopic measurement, and irradiating the defective spot with a laser beam to repair the defective spot of the graphene film. The repairing of the defective spot of the local area includes: performing resonance Raman scattering measurement; identifying a local area in which a D band appears as the defective spot of the graphene film when a maximum peak intensity of a spectrum obtained by the resonance Raman scattering measurement in a range of 1310 cmor more and 1350 cmor less is defined as D; and irradiating a spot identified as the defective spot of the graphene film with the laser beam while supplying a carbon source to the spot to thereby repair the defect by filling it with the carbon source.