Laser deposition method and laser deposition apparatus for organic material film or organic-inorganic composite material film

摘要

Solves problems in conventional technologies such as contamination of other vapor deposition materials due to gasification of organic materials, runaway due to inability to control film formation speed, and stably adjusts and controls film formation speed and evaporation speed It is an object of the present invention to provide a laser vapor deposition method and a laser vapor deposition apparatus for organic materials, and in a method for laser vapor deposition of at least one organic material, the duty ratio of a laser for evaporating the organic material is adjusted. It is characterized by doing. Further, the duty ratio is adjusted based on an evaporation rate of the organic substance and a vapor pressure in a vacuum chamber for vapor deposition.