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Electrode apparatus for dielectric barrier plasma treatment and method for surface plasma treatment

机译:用于介电势垒等离子体处理的电极设备和表面等离子体处理的方法

摘要

The invention relates to an electrode arrangement for a dielectric barrier discharge plasma treatment of an irregularly three-dimensionally shaped surface of an electrically conducting body used as a counter electrode, comprising a planar electrode (1) and a dielectric (2, 3), which is designed to be arranged at a defined distance from the surface to be treated in order to form a cold plasma, wherein said arrangement can be produced in a simple manner and can be reliably designed in the use thereof in that the dielectric (2, 3) is formed by a flexible planar material, which is provided with a structure (4) on the side of the flexible planar material facing the surface to be treated in order to form air guiding areas (7) when the dielectric (2, 3) lies on the surface to be treated, and in that the planar electrode is flexible and Is fastened to the dielectric (2, 3) in such a way that a layer (2) of the dielectric (2, 3) shields the electrode (1) from the surface to be treated.
机译:电极装置技术领域本发明涉及一种电极装置,该电极装置用于对用作对电极的导电体的不规则三维形状的表面进行电介质阻挡放电等离子体处理,该电极装置包括平面电极(1)和电介质(2、3),设计成与待处理表面相距一定距离以形成冷等离子体,其中所述布置可以以简单的方式产生,并且可以通过以下方式可靠地设计,即电介质(2、3 )由挠性平面材料形成,该挠性平面材料在面对待处理表面的一侧上具有结构(4),以便在电介质(2、3)形成空气引导区域(7)它位于待处理的表面上,并且平面电极是柔性的,并固定在电介质(2、3)上,使电介质(2、3)的一层(2)屏蔽电极(1) )从要处理的表面。

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