首页>
外国专利>
Injection of gaseous chemicals into cavities formed in intermediate dielectric layers for subsequent thermal diffusion release
Injection of gaseous chemicals into cavities formed in intermediate dielectric layers for subsequent thermal diffusion release
展开▼
机译:将气态化学物质注入形成在中间介电层中的空腔中,以便随后释放热扩散
展开▼
页面导航
摘要
著录项
相似文献
摘要
The present invention generally relates to methods for increasing the lifetime of MEMS devices by reducing the landing velocity on switching by introducing gas into the cavity surrounding the switching element of the MEMS device. The gas is introduced using ion implantation into a cavity close to the cavity housing the switching element and connected to that cavity by a channel through which the gas can flow from one cavity to the other. The implantation energy is chosen to implant many of the atoms close to the inside roof and floor of the cavity so that on annealing those atoms diffuse into the cavity. The gas provides gas damping which reduces the kinetic energy of the switching MEMS device which then should have a longer lifetime.
展开▼