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IMPRINTING METHOD AND IMPRINTING APPARATUS, SAMPLE SHOT EXTRACTION METHOD, AND ARTICLE MANUFACTURING METHOD USING SAME
IMPRINTING METHOD AND IMPRINTING APPARATUS, SAMPLE SHOT EXTRACTION METHOD, AND ARTICLE MANUFACTURING METHOD USING SAME
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机译:使用相同的浸染方法和浸染装置,样品提取方法和制品制造方法
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摘要
An imprinting method is capable of strictly interpolating application distribution of uncured resin material being applied to a substrate for each shot and interpolating application distribution of uncured resin material for each shot while reducing workload in a generation step. The imprinting apparatus includes a mold; a mold driving unit; a dispenser that applies uncured resin material to the substrate; a light source that cures uncured resin material as a pattern; a dispenser control unit that controls the dispenser by generating the application distribution of the uncured resin material to the resin pattern for each of a plurality of shots; and a main control unit that interpolates application distribution of uncured resin material, which has been generated by the dispenser control unit, using shot layout information of relative position among positions of a plurality of shots, the dispenser, and the light source with respect to the substrate, as variables.
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