首页>
外国专利>
Imprinting method and imprinting apparatus, sample shot extraction method, and article manufacturing method using same
Imprinting method and imprinting apparatus, sample shot extraction method, and article manufacturing method using same
展开▼
机译:压印方法和压印设备,样品拍摄方法以及使用该方法的物品制造方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
An imprinting method is capable of strictly interpolating application distribution of uncured resin material being applied to a substrate for each shot and interpolating application distribution of uncured resin material for each shot while reducing workload in a generation step. The imprinting apparatus includes a mold; a mold driving unit; a dispenser that applies uncured resin material to the substrate; a light source that cures uncured resin material as a pattern; a dispenser control unit that controls the dispenser by generating the application distribution of the uncured resin material to the resin pattern for each of a plurality of shots; and a main control unit that interpolates application distribution of uncured resin material, which has been generated by the dispenser control unit, using shot layout information of relative position among positions of a plurality of shots, the dispenser, and the light source with respect to the substrate, as variables.
展开▼