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System and Method for Imaging a Sample with an Illumination Source Modified by a Spatial Selective Wavelength Filter

机译:用空间选择性波长滤波器修改的照明源对样品成像的系统和方法

摘要

A system for illuminating a sample with a spectrally filtered illumination source includes an illumination source configured to generate a beam of illumination having a first set of wavelengths. In addition, the system includes a wavelength filtering sub-system, a sample stage, an illumination sub-system, a detector, and an objective to focus illumination from the surface of one or more samples and focus the collected illumination to the detector. Further, the wavelength filtering sub-system includes one or more first dispersive elements positioned to introduce spatial dispersion into the beam, a spatial filter element, and one or more dispersive elements positioned to remove spatial dispersion from the beam. The spatial filter element is further positioned to pass at least a portion of the beam including a second set of wavelengths, wherein the second set of wavelengths is a subset of the first set of wavelengths.
机译:用光谱过滤的照明源照明样品的系统包括照明源,该照明源配置为产生具有第一组波长的照明光束。另外,该系统包括波长过滤子系统,样品台,照明子系统,检测器和物镜,该物镜将来自一个或多个样品表面的照明聚焦并将聚焦的照明聚焦至检测器。此外,波长滤波子系统包括一个或多个第一色散元件,其被定位成将空间色散引入光束中,空间滤波器元件,以及一个或多个色散元件,其被定位成从光束中去除空间色散。空间滤光器元件进一步定位成使包括第二组波长的光束的至少一部分通过,其中第二组波长是第一组波长的子集。

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