System and method for imaging a sample using a light source modified by a spatially selective wavelength filter

摘要

A system for illuminating a sample with a spectrally filtered light source includes a light source configured to generate an illumination beam having a first set of wavelengths. In addition, the system includes a wavelength filtering subsystem, a sample stage, an illumination subsystem, a detector, and an objective lens. The objective lens is for focusing the illumination from the surface of one or more samples and focusing the focused illumination on the detector. Further, the wavelength filtering subsystem is arranged to remove one or more first dispersion elements arranged to introduce spatial dispersion in the beam, a spatial filter element, and spatial dispersion from the beam. And one or more dispersive elements. The spatial filter element is disposed so as to pass at least a part of the beam including a second wavelength set. The second wavelength set is a subset of the first wavelength set.