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Membrane-Based Sensor and Method for Robust Manufacture of a Membrane-Based Sensor
Membrane-Based Sensor and Method for Robust Manufacture of a Membrane-Based Sensor
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机译:基于膜的传感器和鲁棒制造基于膜的传感器的方法
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摘要
A membrane-based sensor in one embodiment includes a membrane layer including an upper surface and a lower surface, a backside trench defined on one side by the lower surface, a central cavity defined on a first side by the upper surface, a cap layer positioned above the central cavity, and a first spacer extending from the upper surface to the cap layer and integrally formed with the cap layer, the first spacer defining a second side of the central cavity and an inner membrane portion of the membrane layer.
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