首页> 外国专利> METHOD AND SYSTEM FOR PROVIDING A MAGNETIC LAYER IN A MAGNETIC JUNCTION USABLE IN SPIN TRANSFER TORQUE APPLICATIONS USING A SACRIFICIAL OXIDE LAYER

METHOD AND SYSTEM FOR PROVIDING A MAGNETIC LAYER IN A MAGNETIC JUNCTION USABLE IN SPIN TRANSFER TORQUE APPLICATIONS USING A SACRIFICIAL OXIDE LAYER

机译:提供用于磁性传递中的磁性层的方法和系统,该磁性层可用于使用牺牲氧化物层的自旋传递扭矩应用中

摘要

A magnetic junction and method for providing the magnetic junction are described. The magnetic junction includes free and pinned layers separated by a nonmagnetic spacer layer. The free layer is switchable between stable magnetic states when a write current is passed through the magnetic junction. Providing the pinned and/or free layer(s) includes providing a magnetic layer including a glass-promoting component, providing a sacrificial oxide layer on the magnetic layer, providing a sacrificial layer on the sacrificial oxide layer and performing at least one anneal of the magnetic layer, the sacrificial oxide layer and the sacrificial layer at anneal temperature(s) greater than 300 degrees Celsius and not exceeding 475 degrees Celsius. The magnetic layer is amorphous as-deposited but is at least partially crystallized after the anneal(s). The sacrificial layer includes a sink for the glass-promoting component. The sacrificial layer and the sacrificial oxide layer are removed after the anneal(s).
机译:描述了磁性结和用于提供磁性结的方法。磁性结包括被非磁性间隔层隔开的自由层和被钉扎层。当写入电流通过磁性结时,自由层可在稳定的磁性状态之间切换。提供被钉扎和/或自由层包括:提供包括玻璃促进组分的磁性层;在磁性层上提供牺牲氧化物层;在牺牲氧化物层上提供牺牲层;以及对所述氧化物层进行至少一次退火。在大于或等于300摄氏度且不大于475摄氏度的退火温度下的磁性层,牺牲氧化物层和牺牲层。磁性层是沉积的非晶态,但是在退火之后至少部分结晶。牺牲层包括用于玻璃促进组分的水槽。退火之后,去除牺牲层和牺牲氧化物层。

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