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METHOD AND SYSTEM FOR PROVIDING A MAGNETIC LAYER IN A MAGNETIC JUNCTION USABLE IN SPIN TRANSFER TORQUE APPLICATIONS USING A SACRIFICIAL OXIDE LAYER
METHOD AND SYSTEM FOR PROVIDING A MAGNETIC LAYER IN A MAGNETIC JUNCTION USABLE IN SPIN TRANSFER TORQUE APPLICATIONS USING A SACRIFICIAL OXIDE LAYER
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机译:提供用于磁性传递中的磁性层的方法和系统,该磁性层可用于使用牺牲氧化物层的自旋传递扭矩应用中
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摘要
A magnetic junction and method for providing the magnetic junction are described. The magnetic junction includes free and pinned layers separated by a nonmagnetic spacer layer. The free layer is switchable between stable magnetic states when a write current is passed through the magnetic junction. Providing the pinned and/or free layer(s) includes providing a magnetic layer including a glass-promoting component, providing a sacrificial oxide layer on the magnetic layer, providing a sacrificial layer on the sacrificial oxide layer and performing at least one anneal of the magnetic layer, the sacrificial oxide layer and the sacrificial layer at anneal temperature(s) greater than 300 degrees Celsius and not exceeding 475 degrees Celsius. The magnetic layer is amorphous as-deposited but is at least partially crystallized after the anneal(s). The sacrificial layer includes a sink for the glass-promoting component. The sacrificial layer and the sacrificial oxide layer are removed after the anneal(s).
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