GENERATION OF DIELECTRIC BARRIER DISCHARGE PLASMA USING A MODULATED VOLTAGE

摘要

Modulated power supply includes a first power supply and a second power supply. One from among the first power supply and second power supply supplies a high voltage at a frequency to one electrode of a pair of electrodes of a dielectric barrier discharge (DBD) plasma reactor. The other from among the first power supply and second power supply supplies a high voltage at another, different frequency to the other electrode of the pair of electrodes of the DBD plasma reactor.