Manufacturing Methods of MOSFET-Type Compact Three-Dimensional Memory

摘要

Manufacturing methods of MOSFET-type compact three-dimensional memory (3D-M_C) are disclosed. In a memory level stacked above the substrate, an x-line extends from a memory array to an above-substrate decoding stage. A MOSFET-type transistor is formed on the x-line as a decoding device for the above-substrate decoding stage, where the overlap portion of the x-line with the control-line (c-line) is semi-conductive.