首页>
外国专利>
Carrier-depletion based silicon waveguide resonant cavity modulator with integrated optical power monitor
Carrier-depletion based silicon waveguide resonant cavity modulator with integrated optical power monitor
展开▼
机译:具有集成光功率监控器的基于载流子的硅波导谐振腔调制器
展开▼
页面导航
摘要
著录项
相似文献
摘要
A carrier-depletion based silicon waveguide resonant cavity modulator includes a silicon waveguide based resonant cavity. The resonant cavity includes an optical modulation section and an optical power monitoring section. The optical power monitoring section includes an integrated lateral PIN diode including a doping compensated I region having a high defect density and a low net free carrier concentration. The doping compensated I region may be formed by performing a P-type implantation step and an N-type implantation step with overlapping ion implantation windows.
展开▼