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System and method for using a rate of decay measurement for real time measurement and correction of zero offset and zero drift of a mass flow controller or mass flow meter
System and method for using a rate of decay measurement for real time measurement and correction of zero offset and zero drift of a mass flow controller or mass flow meter
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机译:使用衰减率测量值实时测量和校正质量流量控制器或质量流量计的零偏移和零漂移的系统和方法
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摘要
The disclosed embodiments include a method, apparatus, and computer program product for providing a self-validating mass flow controller or mass flow meter. For example, in one embodiment, a self-validating mass flow controller is disclosed that does not require any software modification to a tool/tool controller in which the mass flow controller is being utilized. In other embodiments, a self-validating mass flow controller is disclosed that does not require any hardware or mechanical changes to an existing mass flow controller. Still, the disclosed embodiments further include a self-validating mass flow controller that is configured to determine valve leak and sensor offset simultaneously for performing real time in-situ correction of a mass flow controller's output for zero offset or zero drift in the presence of valve leak.
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