SYSTEM AND METHOD FOR USING A RATE OF DECAY MEASUREMENT FOR REAL TIME MEASUREMENT AND CORRECTION OF ZERO OFFSET AND ZERO DRIFT OF A MASS FLOW CONTROLLER OR MASS FLOW METER

摘要

The disclosed embodiments include a method, apparatus, and computer program product for providing a self-verifying mass flow controller or mass flow meter. For example, in one embodiment, a magnetically versatile mass flow controller is disclosed that does not require any software modifications to the tool / tool control in which the mass flow controller is used. In another embodiment, a self-verifying mass flow controller is disclosed that does not require any hardware or mechanical modifications to existing mass flow controllers. The disclosed embodiments further include a magnetically-assisted mass flow controller that simultaneously performs valve-leakage values and sensor offsets in the presence of valve leakage to perform real-time field calibration of the mass flow controller output to zero offset or zero drift.