embedded image "/> Monomer for hardmask composition, hardmask composition including the monomer, and method of forming patterns using the hardmask composition
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Monomer for hardmask composition, hardmask composition including the monomer, and method of forming patterns using the hardmask composition

机译:用于硬掩模组合物的单体,包括该单体的硬掩模组合物以及使用该硬掩模组合物形成图案的方法

摘要

A monomer for a hardmask composition, a hardmask composition, and a method of forming patterns, the monomer being represented by the following Chemical Formula 1:; embedded image
机译:硬掩模组合物用单体,硬掩模组合物和图案形成方法由下述化学式1表示: “嵌入式图像”

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