首页>
外国专利>
Slurry feed system and method of providing slurry to chemical mechanical planarization station
Slurry feed system and method of providing slurry to chemical mechanical planarization station
展开▼
机译:浆料进料系统和向化学机械平面化站提供浆料的方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
A slurry feed system includes a valve manifold, a mixing tank, a slurry feed pump, a surface tension meter and suction piping, discharge piping as well as slurry return piping. The valve manifold includes inlet piping, outlet piping fluidly coupled to the inlet piping, and a slurry discharge header for supplying slurry to CMP stations. The slurry feed pump is connected to the mixing tank by the suction piping. The discharge piping is routed from the slurry feed pump to the inlet piping of the valve manifold. The slurry return piping is routed from the outlet piping of the valve manifold to the mixing tank. The suction piping, the discharge piping, the inlet piping, the outlet piping and the slurry return piping define a first slurry supply loop. The surface tension meter is coupled to the first slurry supply loop.
展开▼