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Wet treatment apparatus and substrate treatment apparatus provided with the same
Wet treatment apparatus and substrate treatment apparatus provided with the same
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机译:湿处理装置及具备该湿处理装置的基板处理装置
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摘要
The present invention provides a wet treatment apparatus having divided base frames and waterproofing pans, which has an enhanced waterproofing property and can be easily assembled. A wet treatment apparatus 10 is provided with a first base frame 13 and a second base frame 14. In addition, a first waterproofing pan 15 is arranged on a mounting surface 13a of the first base frame 13, and a second waterproofing pan 16 is arranged on a mounting surface 14a of the second base frame 14. A plate-shaped structure 17 having flexibility is provided on an end 15a of the first waterproofing pan 15. The plate-shaped structure 17 is configured to cover a gap between the end 15a of the first waterproofing pan 15 and an end 16a of the second waterproofing pan 16, and can waterproof a space between the end 15a of the first waterproofing pan 15 and the end 16a of the second waterproofing pan 16. 展开▼
机译:本发明提供了一种具有分开的底架和防水盘的湿处理设备,其具有增强的防水性能并且可以容易地组装。湿式处理设备 10 B>设有第一基础框架 13 B>和第二基础框架 14 B>。另外,在第一底座 13 B>的安装面 13 B> a I>上设置有第一防水盘 15 B>。并且,第二防水盘 16 B>布置在第二基础框架 14 B>的安装表面 14 B> a I>上。具有挠性的板状结构 17 B>设置在第一防水盘 15 B>的端部 15 B> a I>上。板状结构 17 B>被构造为覆盖第一防水盘 15 B的端部 15 B> a I>之间的间隙。 >和第二个防水锅 16 B>的一端 16 B> a I>,并且可以对一端 15 B>之间的空间进行防水处理第一个防水锅 15 B>的 a I>和第二个防水锅 16的末端 16 B> a I>。 B>
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