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Photo mask including pre-alignment keys and photolithography apparatus performing a pre-alignment process for the photo mask
Photo mask including pre-alignment keys and photolithography apparatus performing a pre-alignment process for the photo mask
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机译:包括预对准键的光掩模和对光掩模执行预对准过程的光刻设备
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摘要
A photo mask includes a pre-alignment key used in a pre-alignment process performed in a photolithography apparatus. The pre-alignment key includes a pre-alignment pattern including a light transmitting area and a light blocking area surrounding the pre-alignment pattern. The light blocking area includes a plurality of light blocking patterns and a diffraction grating pattern separating the plurality of light blocking patterns from each other.
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