Nitride semiconductor ultraviolet light-emitting element and nitride semiconductor ultraviolet light-emitting device

摘要

There is provided a nitride semiconductor ultraviolet light-emitting element capable of efficiently releasing a waste heat generated in an ultraviolet light emitting operation. The nitride semiconductor ultraviolet light-emitting element includes a semiconductor laminated portion 11 having an n-type AlGaN layer 6, an active layer 7 of an AlGaN layer, and p-type AlGaN layers 9 and 10; an n electrode 13; a p electrode 12; a protective insulating film 14, and a first plated electrode 15 formed by a wet plating method and composed of copper or alloy containing copper as a main component. The semiconductor laminated portion 11 is formed in a first region R1, and the p electrode is formed on the portion 11. An upper surface of the n-type AlGaN-based semiconductor layer 6 is exposed in a second region, and the n electrode 13 is formed on the upper surface. The protective insulating film 14 has openings for exposing at least one part of the n electrode 13 and at least one part of the p electrode 12. The first plated electrode 15 is spaced apart from the exposed surface of the n electrode 13 and covers a whole upper surface and a whole outer side surface of the first region R1, and a part of the second region R2 which is in contact with the first region R1.