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Integrated MEMS pressure sensor and MEMS inertial sensor
Integrated MEMS pressure sensor and MEMS inertial sensor
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机译:集成MEMS压力传感器和MEMS惯性传感器
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摘要
Integrated MEMS devices for pressure sensing and inertial sensing, methods for fabricating such integrated devices, and methods for fabricating vertically integrated MEMS pressure sensor/inertial sensor devices are provided. In an example, a method for fabricating an integrated device for pressure and inertial sensing includes forming a MEMS pressure sensor on a first side of a semiconductor substrate. The method further includes forming a MEMS inertial sensor on a second side of the semiconductor substrate. The second side of the semiconductor substrate is opposite the first side of the semiconductor substrate.
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