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Lightup prevention using multi-layer ceramic fabrication techniques
Lightup prevention using multi-layer ceramic fabrication techniques
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机译:使用多层陶瓷制造技术防止照亮
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摘要
In accordance with this disclosure, there are provided several inventions, including an electrostatic chuck apparatus comprising multiple layers with cutouts that form a labyrinth structure which defined a path for cooling or heating gas. The structure prevents particles from accelerating such that they form unwanted lightup in the gas flow path.
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