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Low-temperature polysilicon membrane and preparation method thereof, thin-film transistor and display device
Low-temperature polysilicon membrane and preparation method thereof, thin-film transistor and display device
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机译:低温多晶硅膜及其制备方法,薄膜晶体管和显示装置
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摘要
A method for preparing an LTPS membrane, including: forming an amorphous silicon (a-Si) layer (S3) on a substrate (S1) by a patterning process, in which the a-Si layer (S3) comprises a plurality of convex structures (S32) and etched areas (S31) which are disposed along circumference of the plurality of convex structures and partially etched; and performing excimer laser crystallization (ELC) on the a-Si layer (S3) and obtaining the LTPS membrane. A thin-film transistor (TFT) and a display device are further disclosed, which are used for overcoming poor uniformity of the polysilicon membrane prepared by the ELC technology.
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