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MEMS based photonic devices and methods for forming

机译:基于MEMS的光子器件及其形成方法

摘要

Various particular embodiments include a primary waveguide including an end section; cantilevered waveguides, each cantilevered waveguide including an end section disposed adjacent the end section of the primary waveguide; and control pins for applying an electrical bias to the cantilevered waveguides to selectively displace the end sections of the cantilevered waveguides away from the end section of the primary waveguide.
机译:各种特定的实施例包括初级波导,其包括端部。悬臂式波导,每个悬臂式波导包括与主波导的端部相邻设置的端部;控制销用于向悬臂波导施加电偏压以选择性地使悬臂波导的端部远离主波导的端部。

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