A MICRO-HALL SENSOR WITH TANGENTIAL SENSITIVITY

摘要

The Micro-Hall sensor with tangential sensitivity contains a semiconductor wafer (1) of mixed type conductivity, on the one side of which are formed on equal distances from each other three rectangular ohmic contacts, first (2), second (3) and third (4), placed parallel to their long sides, as the second (3) is central and juxtaposed to it on both of its long sides are placed- on the left the first (2) and on the right the third (4) contacts. To the short sides of the central contact (3) and in equal distances from it are located a batch of side ohmic contacts- third (7) and fourth (8), a power source (11) and a measurement amplifier (12). The first (2) and third (4) rectangular contacts are linked with one of the outlets of the power source (11), the other outlet of which is connected to the central contact (3). The third (7) and fourth (8) side contacts are connected with the input of the amplifier (12). The magnetic field which is being measured is in the plain of the wafer (1) and is perpendicular of the long sides of the contacts (2, 3 and 4). Two more pairs of side ohmic contacts are formed, first (5) and second (6), and fifth (9) and sixth (1), placed to the short sides of the left (2) and conversely right (4) rectangular contacts. The first (5), third (7) and fifth (9) side contacts are to one of the short sides, and the second (2), fourth (8) and sixth (10)- conversely to the other short side of the rectangular contacts (2, 3 and 4) The side contacts first (5) and sixth (10) are connected to the inlet of another measurement amplifier (13), and the second (6) and fifth (9) contacts are joint to each other. The first (5) and third (7) side contacts are joint simultaneously only with the non-inversion or only to the inversion inlets of the amplifiers (12 and 13), the outlets of which are connected to the inlet of the differential amplifier (14), whose outlet is the outlet (15) of the Hall micro-processor