method for automatically controlling the mass flow of a gas through a hole through which, in use, blocked flow is arranged to occur, controller for regulating the mass flow of a gas, computer program product executable by an apparatus programmable processing and computer usable storage media

摘要

There is provided a method of automatically controlling the mass flow rate of a gas through an orifice through which, in use, choked flow is arranged to occur. The method uses an electronic valve located downstream of a gas source, a piezoelectric oscillator in contact with the gas upstream of the orifice and downstream of the electronic valve and a temperature sensor. The method comprises a) driving the piezoelectric crystal oscillator at a resonant frequency b) measuring the resonant frequency of the piezoelectric oscillator c) measuring the temperature of the gas; and d) controlling the electronic valve in response to the resonant frequency of the piezoelectric oscillator and the temperature of the gas in order to regulate the mass flow rate of gas through said orifice.