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Fluid analysis system with integrated computing element formed using atomic layer deposition of
Fluid analysis system with integrated computing element formed using atomic layer deposition of
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机译:具有通过原子层沉积形成的集成计算元素的流体分析系统
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摘要
Summary analysis system with integrated fluid computing element formed using atomic layer deposition analysis systems of fluid elements with embedded computing (ICES) or other components of the optical path formed using atomic layer deposition (ALD) permi Have tolerances improved and design flexibility.In some of the methods disclosed, a fluid analysis system includes a light source and an ice. The system of analysis of fluid also includes a detector that converts optical signals into electrical signals. The ice comprises a plurality of optical layers, in which at least one of the plurality of optical layers is formed by using ALD.A related method includes selecting a project ice having a plurality of optical layers. The method also includes forming at least one of the plurality of optical layers of ice using ALD to allow the prediction of a chemical or physical property of a substance.A column connection includes a forming section forming tool and a tool for analysis of fluid associated with the section of the forming tool.
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