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Method for synthesizing a material, in particular diamonds, by chemical vapor deposition, as well as device for applying the method

机译:通过化学气相沉积合成材料,特别是钻石的方法,以及应用该方法的装置

摘要

Method for synthesizing a material by chemical vapor deposition (CVD), according to which a plasma is created in a vacuum chamber in the vicinity of a substrate, and according to which a carbon-carrying substance and H2 are introduced into the chamber in order to produce in the chamber a gas comprising substances carrying reactive-carbon atoms in the form of unsaturated molecules or radicals from which the synthesis of said material will be performed, and in that the electromagnetic absorption and inelastic diffusion spectra of the solid material to be synthesized are used to take from these spectra the absorption frequencies that contribute to the reactions that lead to the formation of the solid material to be synthesized, and in that energetic rays are produced in the form of a photon beam carrying quantities of energy determined by each of the frequencies corresponding to said absorption and inelastic diffusion frequencies, said photon beam being injected into the plasma where, for energy states of the solid material, an absorption of these photons having the energy corresponding to these energy states is effected by the substances carrying said reactive-carbon atoms.
机译:通过化学气相沉积(CVD)合成材料的方法,根据该方法,在基板附近的真空腔室中产生等离子体,并根据该方法将碳载物和H2引入腔室中,以便在腔室内产生一种气体,该气体包含带有不饱和分子或自由基形式的反应性碳原子的物质,将从该气体中进行所述材料的合成,并且将要合成的固体材料的电磁吸收和非弹性扩散光谱得以合成用于从这些光谱中获取有助于反应的吸收频率,这些反应导致形成要合成的固体材料,并且高能射线以光子束的形式产生,其携带的能量由每种能量确定。对应于所述吸收和非弹性扩散频率的频率,所述光子束被注入到等离子体中,其中在固体材料的能量状态下,具有相应于这些能量状态的能量的这些光子的吸收受到携带所述反应性碳原子的物质的影响。

著录项

  • 公开/公告号IL224470A

    专利类型

  • 公开/公告日2017-03-30

    原文格式PDF

  • 申请/专利权人 DIAROTECH;

    申请/专利号IL20130224470

  • 发明设计人

    申请日2013-01-29

  • 分类号

  • 国家 IL

  • 入库时间 2022-08-21 13:38:59

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