Development of a polygonal barrel-plasma enhanced chemical vapor deposition method for preparing powdered materials with a diamond-like carbon film

摘要

A novel polygonal barrel-plasma enhanced chemical vapor deposition (PB-PECVD) method was developed to prepare powdered materials with diamond-like carbon (DLC) films. To investigate the effects of frequency on the DLC film preparation, frequency power supplies of 250 kHz and 13.56 MHz were used and a DLC film was successfully formed on an SiO2 glass plate at 250 kHz. The PB-PECVD process was further examined by using polymethyl methacrylate (PMMA) powder sample. It was determined that a DLC film could be uniformly deposited onto the PMMA particles by rotating a hexagonal barrel including the PMMA sample during the PB-PECVD procedure while operating at 250 kHz.