DESIGN AND DEVELOPMENT OF SINGLE STAGE COARSE-FINE MECHANISM FOR PRECISION APPLICATION.

摘要

Flexure based mechanisms also referred as flexures have immense scope in their use for applications involving high precision motion. Their superior architecture provides better load capacity and positioning accuracy. The Flexible joints would give better results than universal and spherical joints because they eliminate friction and backlash. Flexures can be designed to provide linear elastic motion with a high resolution (on the order of nanometers) over small ranges of motion (on order of micrometers).They are widely being used as motion-guidance or bearing elements in applications requiring multi-degree-of-freedom positioning and alignment. Example applications include positioning a probe or sample in atomic force microscopy, alignment of tool and sample in stamping processes, and fine-positioning of wafer steppers in semiconductor manufacturing.