首页>
外国专利>
PROCESS FLAGGING AND CLUSTER DETECTION WITHOUT REQUIRING RECONSTRUCTION
PROCESS FLAGGING AND CLUSTER DETECTION WITHOUT REQUIRING RECONSTRUCTION
展开▼
机译:无需重构的过程标志和集群检测
展开▼
页面导航
摘要
著录项
相似文献
摘要
Disclosed herein is a method comprising: determining, using a computer, one or more statistical features from data obtained from a lithography process, a lithography apparatus, a substrate processed by the lithography process or the lithography apparatus; wherein determining the statistical features does not comprise reconstructing a characteristic of the lithography process, of the lithography apparatus, or of the substrate.
展开▼