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Process flagging and cluster detection without requiring reconstruction
Process flagging and cluster detection without requiring reconstruction
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机译:进程标记和集群检测,无需重建
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摘要
A method including determining one or more statistical features from data obtained from a lithography process, a lithography apparatus, a substrate processed by the lithography process or the lithography apparatus, wherein determining the one or more statistical features does not include reconstructing a characteristic of the lithography process, of the lithography apparatus, or of the substrate.
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