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METHOD OF MEASURING THE ERROR OF ORIGONALITY OF A PLANNING SURFACE OF A PEZZO RESPECTED TO A ROTATION ASS, AND THE COMPATIVE MEASUREMENT STATION
METHOD OF MEASURING THE ERROR OF ORIGONALITY OF A PLANNING SURFACE OF A PEZZO RESPECTED TO A ROTATION ASS, AND THE COMPATIVE MEASUREMENT STATION
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机译:测量相对于旋转组件的Pezzo规划平面的原始性的误差的方法以及对比测量站
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摘要
A method for measuring the axial runout of a plane surface (22) of a workpiece (2) with respect to an axis of rotation (6) by means of a linear image sensor (19), in which a first optical scanning of the non-rotating workpiece is performed by translating the sensor relative to the workpiece along a direction (Z) parallel to the axis of rotation to obtain a first light intensity trend (I1) of a pixel (23) as the relative position between the workpiece and the sensor varies, and a relative position (ZR) of plane surface is determined as a function of the first light intensity trend. A second optical scanning of the workpiece is performed in the relative position of the plane surface while the workpiece rotates with respect to the axis for obtaining a second light intensity trend (I2) of the pixel as the angular position (θ) of the workpiece varies. A maximum position value and a minimum position value (Zmax, Zmin) are determined from the first light intensity trend using, as input data, light intensity values derived, or obtained by processing, by the second light intensity trend, and the axial runout is calculated as the difference between the maximum and minimum position values.
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