首页> 外国专利> METHOD OF MEASURING THE ERROR OF ORIGONALITY OF A PLANNING SURFACE OF A PEZZO RESPECTED TO A ROTATION ASS, AND THE COMPATIVE MEASUREMENT STATION

METHOD OF MEASURING THE ERROR OF ORIGONALITY OF A PLANNING SURFACE OF A PEZZO RESPECTED TO A ROTATION ASS, AND THE COMPATIVE MEASUREMENT STATION

机译:测量相对于旋转组件的Pezzo规划平面的原始性的误差的方法以及对比测量站

摘要

A method for measuring the axial runout of a plane surface (22) of a workpiece (2) with respect to an axis of rotation (6) by means of a linear image sensor (19), in which a first optical scanning of the non-rotating workpiece is performed by translating the sensor relative to the workpiece along a direction (Z) parallel to the axis of rotation to obtain a first light intensity trend (I1) of a pixel (23) as the relative position between the workpiece and the sensor varies, and a relative position (ZR) of plane surface is determined as a function of the first light intensity trend. A second optical scanning of the workpiece is performed in the relative position of the plane surface while the workpiece rotates with respect to the axis for obtaining a second light intensity trend (I2) of the pixel as the angular position (θ) of the workpiece varies. A maximum position value and a minimum position value (Zmax, Zmin) are determined from the first light intensity trend using, as input data, light intensity values derived, or obtained by processing, by the second light intensity trend, and the axial runout is calculated as the difference between the maximum and minimum position values.
机译:一种通过线性图像传感器(19)测量工件(2)的平面(22)相对于旋转轴(6)的轴向跳动的方法,其中,首先对工件通过沿着平行于旋转轴的方向(Z)相对于工件平移传感器来执行旋转工件,以获得像素(23)的第一光强度趋势(I1)作为工件与工件之间的相对位置传感器变化,并且根据第一光强度趋势确定平面的相对位置(ZR)。当工件相对于轴线旋转时,在平面的相对位置上执行工件的第二光学扫描,以随着工件的角位置(θ)变化而获得像素的第二光强度趋势(I2)。 。使用第二光强度趋势导出或通过处理获得的光强度值作为输入数据,从第一光强度趋势确定最大位置值和最小位置值(Zmax,Zmin),并且轴向跳动为计算为最大和最小位置值之间的差异。

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