PHOTONIC CRYSTAL STUCTURE-BASED OPTICAL DEVICE AND CORRESPONDING FABRICATION METHOD

摘要

A method of fabricating an acoustic sensor is provided. The method includes providing at least one photonic crystal structure. An optical waveguide is optically coupled to the at least one photonic crystal structure. A structural portion is mechanically coupled to the at least one photonic crystal structure and to the optical waveguide, wherein a distance between the at least one photonic crystal structure and the end of the optical waveguide is less than about 15 microns.