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UNCERTAINTY AWARE INTERCONNECT DESIGN TO IMPROVE CIRCUIT PERFORMANCE AND/OR YIELD

机译:不确定性AWARE互连设计可提高电路性能和/或成品率

摘要

Methods and an apparatus related to generating parameters and guidelines used in the manufacture of semiconductor IC devices are described. A method includes measuring a first oscillating signal (410) produced by a first ring oscillator (404) that includes a first interconnect provided in a first interconnect layer of an IC, selecting a first mode of operation for a second ring oscillator circuit (406, 408) that includes a second interconnect disposed in alignment with the first interconnect, selecting a second mode of operation for the second ring oscillator circuit (406, 408), and determining one or more characteristics of the first interconnect based on a difference in frequency of the first oscillating signal (410) produced when the second ring oscillator circuit is operated in the first mode and frequency of the first oscillating signal (410) when the second ring oscillator circuit is operated in the second mode.
机译:描述了与产生在半导体IC器件的制造中使用的参数和指南有关的方法和设备。一种方法包括测量由第一环形振荡器(404)产生的第一振荡信号(410),第一环形振荡器(404)包括设置在IC的第一互连层中的第一互连,为第二环形振荡器电路(406)选择第一操作模式, 408),该第二互连包括与第一互连对齐设置的第二互连,为第二环形振荡器电路选择第二操作模式(406、408),并根据频率的差确定第一互连的一个或多个特性。当第二环形振荡器电路在第一模式下工作时产生的第一振荡信号(410)和第二环形振荡器电路在第二模式下工作时产生的第一振荡信号(410)的频率。

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