MASKING DEVICE FOR USE IN A LITHIUM DEPOSITION PROCESS IN THE MANUFACTURING OF THIN FILM BATTERIES, APPARATUS CONFIGURED FOR A LITHIUM DEPOSITION PROCESS, METHOD FOR MANUFACTURING ELECTRODES OF THIN FILM BATTERIES, AND THIN FILM BATTERY

摘要

The present disclosure provides a masking device (100) for use in a lithium deposition process in the manufacturing of thin film batteries. The masking device (100) includes a mask portion (110) made of a metal or metal alloy, and one or more openings (120) in the mask portion (110), wherein the one or more openings (120) are configured to allow particles of a deposition material to pass through the mask portion (110), and wherein a size of each- opening of the one or more openings, (120) is at least 0.5 cm2.