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RECURSIVE INJECT APPARATUS FOR IMPROVED DISTRIBUTION OF GAS
RECURSIVE INJECT APPARATUS FOR IMPROVED DISTRIBUTION OF GAS
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机译:改进气体分布的递进式注射装置
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摘要
Apparatus and methods for processing a substrate including an injector unit insert with a plurality of flow paths leading to a first plenum, each of the flow paths providing one or more of substantially the same residence time, length and/or conductance. Injector units including the injector unit inserts have increased flow uniformity.
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