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Recursive inject apparatus for improved distribution of gas
Recursive inject apparatus for improved distribution of gas
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机译:递归注入装置,用于改善气体分布
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摘要
Apparatus and methods for processing a substrate including an injector unit insert with a plurality of flow paths leading to a first plenum, each of the flow paths providing one or more of substantially the same residence time, length and/or conductance. Injector units including the injector unit inserts have increased flow uniformity.
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