ELECTRON MICROSCOPE ELECTRON GUN FOR FACILITATING POSITION ADJUSTMENT AND ELECTRON MICROSCOPE INCLUDING SAME

摘要

The present invention relates to an electron gun for facilitating position adjustment, and an electron microscope including the same, the electron gun improving a vacuum structure so as to easily move a filament block or an electron tip of an electron gun without having bellows for maintaining a vacuum when the center axis of the filament block or the electron tip of the electron gun is mechanically misaligned with the center axis of a anode and a focusing lens. Additionally, the electron gun enables an upper flat plate to be moved on a dual O-ring sealing unit or a magnetic fluid sealing unit without having bellows, which enclose and seal an electron beam generation unit, in order to align the center axis of an electron beam with a anode plate facing a Wehnelt cylinder or with a second anode arranged side by side to a field emission electron source and a first anode, such that an electron beam is easily aligned, a simplified structure and an easy assembling and disassembling are enabled, and a reusable rubber O-ring can be used. In addition, compared with stainless steel, there is no difference in the maintenance of an ultra-high vacuum, and since mild steel having a high relative magnetic permeability is used as a chamber, the inflow of a stray magnetic field can be prevented without having an additional configuration, encompassing an electron beam generation unit, such as mu-metal or permalloy, thereby facilitating manufacturing and having economical effects since a complex configuration is not adopted.