SELF-SHARPENING POLISHING DEVICE IN DYNAMIC MAGNETIC FIELD FOR MAGNETORHEOLOGICAL FLEXIBLE POLISHING PAD AND POLISHING METHOD THEREFOR

摘要

Disclosed are a self-sharpening polishing device in a dynamic magnetic field for a magnetorheological flexible polishing pad and a polishing method therefor. The device comprises a polishing disk revolution mechanism and a synchronous rotation driving mechanism with multiple magnetic poles, wherein the polishing disk revolution mechanism comprises a transmission shaft electric motor (37), a transmission shaft (13), a transferring disk (11), an eccentric shaft fixing disk (3), a cup-like polishing disk (1), and a transmission shaft transmission mechanism. The synchronous rotation driving mechanism with multiple magnetic poles comprises an eccentric main shaft (43), a synchronous rotation driving disk (8), a flexible eccentric rotation shaft (19), an eccentric sleeve (20), magnetic poles (21), an eccentric shaft fixing disk (3), and a main shaft electric motor (17) and the like. The whole process from rough polishing to fine polishing can be realized by one pass of processing at a high processing efficiency, and the surface of the workpiece obtained is of good uniformity without surface or subsurface damages. The device is low in cost, and is suitable for ultra-smooth and uniform polishing processing for a plane of an optical element with a large diameter at a high efficiency.