An experimental analysis of strontium titanate ceramic substrates polished by magnetorheological finishing with dynamic magnetic fields formed by rotating magnetic poles

摘要

Strontium titanate (SrTiO3, STO) ceramic substrate is an incipient ferroelectric material with a perovskite structure and which has a wide range of applications in the fields of microwave, millimetre wave, and optic fibre. This paper reports on a system of experiments carried out on STO substrates using a new magnetorheological (MR) finishing process where dynamic magnetic fields are formed by magnetic poles rotate. The results show that a circular ring shaped polishing belt with a stability evaluation zone appears on the surface after being polished by MR finishing with a single-point dynamic magnetic field. The dynamic magnetic fields are stronger when the revolutions of magnetic pole increase and eccentricity of pole enlarge, with the surface finish is smoother and more material is removed. The optimum machining times, machining gap, oscillation distance, eccentricity of pole, revolutions of the workpiece and magnetic pole are 60 min, 0.8 mm, 0 mm, 7 mm, and 350 r min(-1) and 90 r min(-1), respectively, and the best MR fluid consists of 6 wt% of diamond abrasives in W1 particle size and 18 wt% of carbonyl iron powder in W3.5 particle size. A surface roughness of Ra and a material removal rate of 8 nm and 0.154 mu m min(-1) can be obtained in these optimum process conditions. Finally, the polishing mechanism for dynamic magnetic fields and the mechanism for removing material from STO ceramic substrates are discussed in detail.